BAW resonators meet the critical requirements necessary for mobile communication and offer highly selective filter\napplications. Nevertheless, wide bandwidth frequency bands pose a challenge for modern BAW technology. In this work, mirror-type BAW resonators comprising AlN with high Sc concentrations up to 35 at.- % and advanced BAW concepts were investigated. It was possible to develop an optimized process sequence with high Q and high-piezoelectric AlScN layers. In addition, the optimized thin film was integrated into BAW resonators and optimized with respect to improved bandwidth and high Q-factor using proper design methods. Finally, the optimized AlScN-based resonators were used to demonstrate the performance in purely acoustic BAW filters for critical frequencies up to 5 GHz. The improvement of the material and the compilation of a material data set also offered new possibilities to investigate advanced filter concepts like acoustically coupled resonators, a reconfigurable approach and the application of novel LC BAW hybrid filter topologies. In conclusion, the developed resonators and methods push the application of high-coupling AlScN for improved and advanced BAW technologies, which are capable of meeting the growing demands on wide bandwidth filter technologies.<\/p>","protected":false},"excerpt":{"rendered":"
BAW-Resonatoren erf\u00fcllen die kritischen Anforderungen, die f\u00fcr die mobile Kommunikation n\u00f6tig sind und bieten hochselektive Filteranwendungen. Dennoch stellen Frequenzb\u00e4nder mit gro\u00dfer Bandbreite eine Herausforderung f\u00fcr die moderne BAW-Technologie dar. In dieser Arbeit wurden BAW-Resonatoren des Spiegel-Typs aus AlScN mit hohen Sc-Konzentrationen von bis zu 35 At.-% und fortgeschrittene BAW-Konzepte untersucht, um den geforderten Bandbreiten aktueller […]<\/p>\n","protected":false},"featured_media":1422,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"product_brand":[],"product_cat":[49],"product_tag":[],"class_list":{"0":"post-1421","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-fau-forschungen-reihe-b-medizin-naturwissenschaft-technik","7":"has-post-title","8":"has-post-date","9":"has-post-category","10":"has-post-tag","11":"has-post-comment","12":"has-post-author","13":"","15":"first","16":"instock","17":"taxable","18":"shipping-taxable","19":"purchasable","20":"product-type-simple"},"acf":{"autor":"Bogner, Andreas","orcid":"","ror":"","herausgeber":"","orcid_hrsg":"","rorhrsg":"","bearbeiter":"","sonstige_beteiligte_personen":"","untertitel":"","zusatz":"","jahr":"2020","zeitschrift":"","serie":"","serie_name":"","serie_band":"","serie_jahr":"","serie_titel_band":"","vortrage":"","issn":"","isbn":"","isbn13":"978-3-96147-365-6","seiten":"xxiii, 226","sonstiges":"","band":35,"auflage":"","opus":"","dspace":"14977","e-isbn_pdf":"978-3-96147-366-3","doi":"https:\/\/doi.org\/10.25593\/978-3-96147-366-3","epub":"","e-isbn_epub":"","doi_epub":"","html":"","e-isbn_html":"","doi_html":"","e-isbn_reader":"","doi_reader":"","digibib":"","urn":"urn:nbn:de:bvb:29-opus4-149786","supplementary_material":"","sprache":["Deutsch"],"ausgabe":"Softcover","suche":" 9783961473656 9783961473663 ","lizenz":"BY-4","bemerkung":""},"builder_content":"","_links":{"self":[{"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/product\/1421","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/comments?post=1421"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/media\/1422"}],"wp:attachment":[{"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/media?parent=1421"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/product_brand?post=1421"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/product_cat?post=1421"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/product_tag?post=1421"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}