Highly accurate manufacturing technologies pose an enormous challenge for dimensional metrology. Due to the lack of suitable sensor systems, measurements on complex geometries with target uncertainties in the nanometre-range are still a largely unresolved problem. This is mainly caused by a lack of highly accurate measurement procedures to calibrate micro-dimensional reference bodies in terms of their coarse and fine form.\nThis thesis presents and examines two procedures that might be applied for the nanometrological calibration of reference bodies. Firstly, a scanning force microscope with an adjustable probe direction to calibrate the fine form and secondly, the bidirectional confocal microscopy to calibrate the coarse form of nanometrological reference bodies.<\/p>","protected":false},"excerpt":{"rendered":"
Hochgenaue Fertigungstechnologien stellen die dimensionelle Messtechnik vor enorme Herausforderungen. In Ermangelung geeigneter Sensorsysteme sind Messungen an komplexen Geometrien mit einem H\u00f6chstwert der Messunsicherheit im Nanometerbereich ein gr\u00f6\u00dftenteils immer noch ungel\u00f6stes Problem. Haupturs\u00e4chlich ist das Fehlen geeigneter Verfahren zur hochgenauen Kalibrierung mikrodimensionaler Referenzk\u00f6rper sowohl hinsichtlich ihrer Grob- als auch ihrer Feingestalt. In der vorliegenden Arbeit werden […]<\/p>\n","protected":false},"featured_media":5587,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"product_brand":[],"product_cat":[34],"product_tag":[],"class_list":{"0":"post-5585","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-fau-studien-aus-dem-maschinenbau","7":"has-post-title","8":"has-post-date","9":"has-post-category","10":"has-post-tag","11":"has-post-comment","12":"has-post-author","13":"","15":"first","16":"instock","17":"taxable","18":"shipping-taxable","19":"purchasable","20":"product-type-simple"},"acf":{"autor":"Schaude, Janik","orcid":"0000-0001-5414-9394","ror":"https:\/\/ror.org\/00f7hpc57","herausgeber":"","orcid_hrsg":"","rorhrsg":"","bearbeiter":"","sonstige_beteiligte_personen":"","untertitel":"","zusatz":"","jahr":"2024","zeitschrift":"","serie":"","serie_name":false,"serie_band":"","serie_jahr":"","serie_titel_band":"","vortrage":"","issn":"","isbn":"","isbn13":"978-3-96147-776-0","seiten":"x, 167","sonstiges":"","band":452,"auflage":"","opus":"","dspace":"32632","e-isbn_pdf":"978-3-96147-777-7","doi":"https:\/\/doi.org\/10.25593\/978-3-96147-777-7","epub":"","e-isbn_epub":"","doi_epub":"","html":"","e-isbn_html":"","doi_html":"","e-isbn_reader":"","doi_reader":"","digibib":"","urn":"urn:nbn:de:101:1-2411010455328.019359042469","supplementary_material":"","sprache":["Deutsch"],"ausgabe":"Softcover","suche":" 9783961477760 9783961477777 ","lizenz":"BY-NC-4","bemerkung":"1\tFAU Press\r\n1\tHB\r\n4\tBSB \/ DNB\r\n1\tTNZB\r\n1\tTIB\r\n"},"builder_content":"","_links":{"self":[{"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/product\/5585","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/comments?post=5585"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/media\/5587"}],"wp:attachment":[{"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/media?parent=5585"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/product_brand?post=5585"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/product_cat?post=5585"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.university-press.fau.de\/en\/wp-json\/wp\/v2\/product_tag?post=5585"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}