Hochfrequent fokusabstandsmodulierte Konfokalsensoren für die Nanokoordinatenmesstechnik

Description

The development of the basics, the development and investigation of a robust, accurate, high-frequency focus-distance-modulated, confocal point sensor as well as its integration and validation in a nanocoordinate measuring system are described. In combination with fibre-coupled confocal lighting and detection, an adjustable, acoustically driven gradient-index liquid lens (TAG lens) as well as two innovative variants of collimation modulation for modulating the focus distance and a signal evaluation with lock-in-amplifikation that is new for confocal microscopy, the use of the sensor in a constant distance scanning mode in a nanocoordinate measuring system is shown by performing large area measurements. This results in a significant increase in the accuracy and reduction of the measurement uncertainty and the measurement time while maintaining the known advantages of the confocal measurement principle.