Description
Micro- and nano measuring technology is driven by the continuous advances in manufacturing technology. The measurement tasks for micro- and nanomeasuring systems are characterized by continually decreasing structure sizes and miniaturization of the features with simultaneously increasing dimensions. Measuring instruments and technologies with high-resolution for quality assurance in the micro- and nanometer range require both quantitative, dimensional measurements with nanometer accuracy and measurements over large measuring ranges for the application of the nanotechnology in industry.
White light interferometry and atomic force microscopy are two important measuring methods in micro- and nano measuring technology. However, their measuring ranges are limited. It is very important that the measuring ranges are extended up to several millimeters in order to meet current metrological challenges. The present work shows the methods for large-area topography measurement with high structural resolution using white light interferometry and atomic force microscopy. A white light interferometric microscope was integrated into the nanopositioning and nanomeasuring machine (NMM-1) for large-area topography measurements even without overlapping fields. The measurement setup, the measuring strategy, the characterization of the metrological properties, the correction of sensor tilts or rotation about the lateral axes and the vertical axis and an experimental investigation to verify the measurement strategy are presented.
A new metrological atomic force microscope for simultaneous measurement of bending, torsion and position of the cantilever with improved signal quality that was also integrated into the NMM-1 for large-area topography measurements is presented. The measurement setup, the measuring strategy, the characterization, the measurement uncertainty and applications of measurement such as step height measurement, pitch determination and large-area measurements are shown.
Ein neues metrologisches Rasterkraftmikroskop für gleichzeitige Messung der Biegung, Torsion und Position des Cantilevers mit verbesserter Signalqualität, welches ebenfalls in die NMM-1 für großflächige Topografiemessungen integriert wurde, wird vorgestellt. Dabei werden der Messaufbau, die Einmessstrategie, die Charakterisierung, die Messunsicherheit und Applikationsmessungen wie Stufenhöhenmessung, Gitterabstandsbestimmung und großflächige Messungen gezeigt.
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